Asml twinscan pdf files

Process transfer strategies between asml immersion scanners article pdf available in proceedings of spie the international society for optical engineering 7274. Separate computing hosts are used for data access and scanner control offering the following automation interfaces. Pas asml brion products calendar system enhancements mature products and. Combining productivity, excellent image resolution, matched overlay. Load locks for the wafers and reticle allow nxe systems to be seamlessly integrated with wafer track and reticle equipment. Publishers pdf, also known as version of record includes final page. Please check the document version of this publication. Building on the successful inline catadioptric lens design concept of the twinscan nxt. An event log is a series of files, which reports on the operation of any manual or automatic process. Pdf process transfer strategies between asml immersion. The twinscan xtm nm stepandscan system is a highproductivity, dualstage krf lithography tool designed for volume mm wafer production at.

Bogdan mihai lazar, asml alignment sequence generator. Arf lithography tool designed for volume 300mm wafer production. Asml alignment sequence generator eindhoven university of. Plasma source the euv source has the following characteristics. Baseliner is providing longterm stability for matched machine overlay, focus uniformity and mean focus of asjl scanner.

The software system ss is what the software twinscan thinks the real system. Pdf stability and imaging of the asml euv alpha demo tool. In addition, imaging matching to other twinscan krf systems and excellent overlay matching to twinscan arf and krf systems is provided enabling seamless integration in a high volume manufacturing environment. Eindhoven university of technology master visualizing asml. Asml twinscan xt 1250d arf scanner configuration items.